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Principles of plasma discharges and materials processing / Michael A. Lieberman, Allan J. Lichtenberg

Publisher New York : Wiley
Year c1994
Codes ID=2000587963 NCID=BA2405445X

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Language English
Size xxvi, 572 p. : ill. ; 25 cm
Notes Includes bibliographical references (p. 559-564) and index
"A Wiley-Interscience publication."
Authors *Lieberman, M. A. (Michael A.)
Lichtenberg, Allan J
Subjects LCSH:Plasma dynamics
LCSH:Thin films -- Surfaces  All Subject Search
LCSH:Plasma etching
LCSH:Plasma chemistry
Classification NDC8:427.6
LCC:QC718.5.D9
DC20:530.4/4
Vol ISBN:0471005770

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Eng.,Ryoushi Energy,Chuseisi Beam Ouyou Rikougaku
530.4/L621 3570424836
0471005770 1994
Information science, Denshi zairyo gaku
530.4/L621 3570474462
0471005770 1994

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