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Semiconductor processing : a symposium / sponsored by ASTM Committee F-1 on Electronics ... [et al.], San Jose, CA, 7-10 Feb., 1984 ; D.C. Gupta, editor
(ASTM special technical publication ; 850)
| Publisher | Philadelphia, PA : ASTM |
|---|---|
| Year | c1984 |
| Codes | ID=2000179603 NCID=BA04324278
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| Language | English |
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| Size | 671 p. : ill. ; 24 cm |
| Notes | "ASTM publication code number (PCN) 04-850000-46." Includes bibliographies and index |
| Authors | Gupta, D. C. (Dinesh C.) ASTM Committee F-1 on Electronics Symposium on Semiconductor Processing (3rd : 1984 : San Jose, Calif.) |
| Subjects | LCSH:Semiconductor industry -- Congresses All Subject Search |
| Classification | LCC:TK7871.85 DC19:621.3815/2 |
| Vol | ISBN:0803104030 |
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| Location | Volume | Call No. | Barcode No. | Status | Comments | ISBN | Printed | Reserve | Restriction | Copy | eDDS | |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Cent.Lib.,Closed Stacks ,Books(European Lang.) |
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621.38152/SE52 | 0170548617 |
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0803104030 | 1984 |
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